1) Processes (Thermal , UV, R to R, others)
2) Large area and high throughput approaches
3) Materials (Resist, Anti-sticking)
4) Template
5) Tools
6) Modelling, simulation and inspection
7) Related and emerging methods(soft lithography, self-assembly, others)
8) Applications (Electronics, Integrated circuit, Optics, Bio, Energy,
other micro-nano devices)